Mobility in high-k dielectric based field effect transistors

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Authors
Ragnarsson, Lars-Ake; Tsai, Wilman; Kerber, Andreas; Chen, P.J.; Cartier, E.; Pantisano, Luigi; De Gendt, Stefan; Heyns, Marc
Conference
Extended Abstracts of the 2003 International Conference on Solid State Device and Materials
Title
Mobility in high-k dielectric based field effect transistors
Publication type
Proceedings paper
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