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An ESCA study on ion beam induced oxidation of GaAs

dc.contributor.authorOsiceanu, Petre
dc.contributor.authorAlay, Josep Lluis
dc.date.accessioned2021-09-29T13:15:37Z
dc.date.available2021-09-29T13:15:37Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/808
dc.sourceIIOimport
dc.titleAn ESCA study on ion beam induced oxidation of GaAs
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage141
dc.source.endpage4
dc.source.conference18th International Semiconductor Conference. CAS'95 Proceedings; 10-13 Oct. 1995; Sinaia, Romenia.
dc.source.conferencelocation
imec.availabilityPublished - imec


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