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MEMS near-DC to RF capacitive series switches

dc.contributor.authorRottenberg, Xavier
dc.contributor.authorGeerlings, J.
dc.contributor.authorMertens, Robert
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-15T06:27:45Z
dc.date.available2021-10-15T06:27:45Z
dc.date.issued2003-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8092
dc.sourceIIOimport
dc.titleMEMS near-DC to RF capacitive series switches
dc.typeProceedings paper
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorMertens, Robert
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecRottenberg, Xavier::0000-0003-0920-1709
dc.source.peerreviewno
dc.source.beginpage975
dc.source.endpage978
dc.source.conferenceProceedings of the 33rd European Microwave Conference
dc.source.conferencedate6/10/2003
dc.source.conferencelocationMünchen Germany
imec.availabilityPublished - imec


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