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RF-MEMS metal contact capacitive switches

dc.contributor.authorRottenberg, Xavier
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorMertens, Robert
dc.contributor.authorDeborgies, F.
dc.contributor.authorMarchand, L.
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-15T06:28:00Z
dc.date.available2021-10-15T06:28:00Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8093
dc.sourceIIOimport
dc.titleRF-MEMS metal contact capacitive switches
dc.typeProceedings paper
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorMertens, Robert
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage19
dc.source.conferenceAbstract Book and Programme 4th Round Table on Micro/Nano Technologies for Space
dc.source.conferencedate20/05/2003
dc.source.conferencelocationNoordwijk The Netherlands
imec.availabilityPublished - imec


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