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Accurate reliability evaluation of non-uniform ultrathin and high-k layers

dc.contributor.authorRoussel, Philippe
dc.contributor.authorDegraeve, Robin
dc.contributor.authorKerber, Andreas
dc.contributor.authorPantisano, Luigi
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-15T06:28:15Z
dc.date.available2021-10-15T06:28:15Z
dc.date.issued2003-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8094
dc.sourceIIOimport
dc.titleAccurate reliability evaluation of non-uniform ultrathin and high-k layers
dc.typeProceedings paper
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage29
dc.source.endpage33
dc.source.conferenceProceedings 41st Annual IEEE International Reliability Physics Symposium
dc.source.conferencedate30/03/2003
dc.source.conferencelocationDallas, TX USA
imec.availabilityPublished - open access


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