Integrating high-k dielectrics: etched polysilicon or metal gates?

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Authors

Schram, Tom; Beckx, Stephan; De Gendt, Stefan; Vertommen, Johan; Lee, S.

Issue

6

Journal

Solid State Technology

Volume

46

Title

Integrating high-k dielectrics: etched polysilicon or metal gates?

Publication type

Journal article

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