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Integrating high-k dielectrics: etched polysilicon or metal gates?
Publication:
Integrating high-k dielectrics: etched polysilicon or metal gates?
Date
2003
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schram, Tom
;
Beckx, Stephan
;
De Gendt, Stefan
;
Vertommen, Johan
;
Lee, S.
Journal
Solid State Technology
Abstract
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1971
since deposited on 2021-10-15
Acq. date: 2025-10-21
Citations
Metrics
Views
1971
since deposited on 2021-10-15
Acq. date: 2025-10-21
Citations