Integration of ALD WCN into a dual damascene oxide module

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Authors
Schuhmacher, Jörg; Beyer, Gerald; Vos, Ingrid; Sutcliffe, Victor; Tokei, Zsolt; Besling, W.; Maex, Karen
Conference
Proceedings of the Advanced Metallization Conference 2002
Title
Integration of ALD WCN into a dual damascene oxide module
Publication type
Proceedings paper
Embargo date
9999-12-31
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