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Strain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopy

dc.contributor.authorSenez, V.
dc.contributor.authorArmigliato, A.
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorCarnevale, G.
dc.contributor.authorBalboni, R.
dc.contributor.authorFrabboni, S.
dc.contributor.authorBenedetti, Alessandro
dc.date.accessioned2021-10-15T06:36:11Z
dc.date.available2021-10-15T06:36:11Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8127
dc.sourceIIOimport
dc.titleStrain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopy
dc.typeJournal article
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage5574
dc.source.endpage5583
dc.source.journalJournal of Applied Physics
dc.source.issue9
dc.source.volume94
imec.availabilityPublished - imec


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