Strain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopy

Author(s)

Senez, V.

;

Armigliato, A.

;

;

Carnevale, G.

;

Balboni, R.

;

Frabboni, S.

;

Benedetti, Alessandro

Journal of Applied Physics

1935 since deposited on 2021-10-15

2last month

Acq. date: 2025-12-07