Authors

Senez, V.; Armigliato, A.; De Wolf, Ingrid; Carnevale, G.; Balboni, R.; Frabboni, S.; Benedetti, Alessandro

Issue

9

Journal

Journal of Applied Physics

Volume

94

Title

Strain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopy

Publication type

Journal article