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Strain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopy
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1936 since deposited on 2021-10-15
1last month
Acq. date: 2026-01-09
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Metrics
Views
1936 since deposited on 2021-10-15
1last month
Acq. date: 2026-01-09
Citations