Publication:
Strain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopy
Date
| dc.contributor.author | Senez, V. | |
| dc.contributor.author | Armigliato, A. | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.author | Carnevale, G. | |
| dc.contributor.author | Balboni, R. | |
| dc.contributor.author | Frabboni, S. | |
| dc.contributor.author | Benedetti, Alessandro | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-15T06:36:11Z | |
| dc.date.available | 2021-10-15T06:36:11Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8127 | |
| dc.source.beginpage | 5574 | |
| dc.source.endpage | 5583 | |
| dc.source.issue | 9 | |
| dc.source.journal | Journal of Applied Physics | |
| dc.source.volume | 94 | |
| dc.title | Strain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopy | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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