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Solvent diffusion in porous low-k dielectric films

dc.contributor.authorShamiryan, Denis
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T06:37:08Z
dc.date.available2021-10-15T06:37:08Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8131
dc.sourceIIOimport
dc.titleSolvent diffusion in porous low-k dielectric films
dc.typeProceedings paper
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpageE9.11
dc.source.conferenceMaterials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics
dc.source.conferencedate21/04/2004
dc.source.conferencelocationSan Fransisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMaterials Research Symposium Symposium Proceedings; Vol.766


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