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Barrier deposition on porous low-k films

dc.contributor.authorShamiryan, Denis
dc.contributor.authorYanovitskaya, Z.S.
dc.contributor.authorIacopi, Francesca
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T06:37:22Z
dc.date.available2021-10-15T06:37:22Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8132
dc.sourceIIOimport
dc.titleBarrier deposition on porous low-k films
dc.typeProceedings paper
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage829
dc.source.endpage833
dc.source.conferenceProceedings of the Advanced Metallization Conference 2002
dc.source.conferencedate1/10/2002
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - open access


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