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What can low-frequency noise teach us about the quality of thin-gate dielectrics?

dc.contributor.authorSimoen, Eddy
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-15T06:40:34Z
dc.date.available2021-10-15T06:40:34Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8145
dc.sourceIIOimport
dc.titleWhat can low-frequency noise teach us about the quality of thin-gate dielectrics?
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.source.peerreviewno
dc.source.beginpage153
dc.source.endpage172
dc.source.conferenceSilicon Nitride and Silicon Dioxide Thin Insulator Films
dc.source.conferencedate27/04/2003
dc.source.conferencelocationParis France
imec.availabilityPublished - imec
imec.internalnotesElectrochemical Society Proceedings; Vol. 2003-02


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