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Low temperature wafer bonding on silicon nitride

dc.contributor.authorPedrine, Antonio
dc.contributor.authorDe Poorter, John
dc.contributor.authorDe Schepper, Luc
dc.contributor.authorBaert, Kris
dc.date.accessioned2021-09-29T13:15:40Z
dc.date.available2021-09-29T13:15:40Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/816
dc.sourceIIOimport
dc.titleLow temperature wafer bonding on silicon nitride
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage285
dc.source.endpage292
dc.source.conferenceSimulation and Design of Microstructures; Sept. 1995; Southampton, UK.
dc.source.conferencedate1/09/1995
dc.source.conferencelocationSouthampton UK
imec.availabilityPublished - open access


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