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Advantage of in-situ over ex-situ techniques as reliability tool: aging kinetics of IMEC's MCM-D discrete passives devices
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Authors
Soussan, Philippe
;
Lekens, Geert
;
Dreesen, R.
;
De Ceuninck, Ward
;
Beyne, Eric
Issue
9_11
Journal
Microelectronics Reliability
Volume
43
Title
Advantage of in-situ over ex-situ techniques as reliability tool: aging kinetics of IMEC's MCM-D discrete passives devices
Publication type
Journal article
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