Thin film encapsulation of acceleration sensors using polysilicon sacrificial layers
| dc.contributor.author | Stahl, H. | |
| dc.contributor.author | Hoechst, A. | |
| dc.contributor.author | Fischer, F. | |
| dc.contributor.author | Metzger, L. | |
| dc.contributor.author | Reichenbach, R. | |
| dc.contributor.author | Laermer, F. | |
| dc.contributor.author | Kronmueller, S. | |
| dc.contributor.author | Breitschwerdt, K. | |
| dc.contributor.author | Gunn, R. | |
| dc.contributor.author | Watcham, S. | |
| dc.contributor.author | Rusu, Cristina | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.date.accessioned | 2021-10-15T06:49:06Z | |
| dc.date.available | 2021-10-15T06:49:06Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8178 | |
| dc.source | IIOimport | |
| dc.title | Thin film encapsulation of acceleration sensors using polysilicon sacrificial layers | |
| dc.type | Proceedings paper | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 1899 | |
| dc.source.endpage | 1902 | |
| dc.source.conference | Proceedings of Transducers. The 12th International Conference on Solid-State Sensors, Actuators and Microsystems | |
| dc.source.conferencedate | 8/06/2003 | |
| dc.source.conferencelocation | Boston USA | |
| imec.availability | Published - imec |
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