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Effect of electron irradiation on thermal donors in oxygen-doped high-resistivity FZ Si

dc.contributor.authorTakakura, K.
dc.contributor.authorOhyama, H.
dc.contributor.authorYoshida, T.
dc.contributor.authorMurakawa, H.
dc.contributor.authorRafi, Joan Marc
dc.contributor.authorJob, R.
dc.contributor.authorUlyashin, A.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-15T06:55:49Z
dc.date.available2021-10-15T06:55:49Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8204
dc.sourceIIOimport
dc.titleEffect of electron irradiation on thermal donors in oxygen-doped high-resistivity FZ Si
dc.typeOral presentation
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.conferenceGettering and Defect Engineering in Semiconductor Technology - GADEST
dc.source.conferencedate20/09/2003
dc.source.conferencelocationBerlin Germany
imec.availabilityPublished - imec


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