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0-level packaging for (RF-)MEMS

dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-15T06:58:34Z
dc.date.available2021-10-15T06:58:34Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8215
dc.sourceIIOimport
dc.title0-level packaging for (RF-)MEMS
dc.typeMeeting abstract
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.conferenceIEEE European Systems Packaging Workshop: Workshop Programme and Abstracts
dc.source.conferencedate20/01/2003
dc.source.conferencelocationCork Ireland
imec.availabilityPublished - imec


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