MEMS for wireless communications: "from RF-MEMS components to RF-MEMS-SiP"

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Authors

Tilmans, Harrie; De Raedt, Walter; Beyne, Eric

Issue

4

Journal

Journal of Micromechanics and Microengineering

Volume

13

Title

MEMS for wireless communications: "from RF-MEMS components to RF-MEMS-SiP"

Publication type

Journal article

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