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MEMS for wireless communications: "from RF-MEMS components to RF-MEMS-SiP"

dc.contributor.authorTilmans, Harrie
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorBeyne, Eric
dc.date.accessioned2021-10-15T06:58:49Z
dc.date.available2021-10-15T06:58:49Z
dc.date.issued2003-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8216
dc.sourceIIOimport
dc.titleMEMS for wireless communications: "from RF-MEMS components to RF-MEMS-SiP"
dc.typeJournal article
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.source.peerreviewno
dc.source.beginpageS139
dc.source.endpageS163
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue4
dc.source.volume13
imec.availabilityPublished - imec


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