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Process and properties of porous low-k dielectrics

dc.contributor.authorTravaly, Youssef
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorBeyer, Gerald
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T07:01:24Z
dc.date.available2021-10-15T07:01:24Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8226
dc.sourceIIOimport
dc.titleProcess and properties of porous low-k dielectrics
dc.typeOral presentation
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conferenceAmerican Vacuum Society Conference
dc.source.conferencedate2/11/2003
dc.source.conferencelocation
imec.availabilityPublished - imec


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