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Fabrication technologies for thin and thick film SnO2 sensors

dc.contributor.authorPijolat, C.
dc.contributor.authorLalauze, R.
dc.contributor.authorRoggen, Jean
dc.contributor.authorHuyberechts, Guido
dc.date.accessioned2021-09-29T13:15:44Z
dc.date.available2021-09-29T13:15:44Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/823
dc.sourceIIOimport
dc.titleFabrication technologies for thin and thick film SnO2 sensors
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage625
dc.source.endpage30
dc.source.conferenceSensor 95: Forum Microsystems Technology; Proceedings 7th International Conference for Sensors Transducers and Systems (SENSOR 9
dc.source.conferencedate9/05/1995
dc.source.conferencelocationNürnberg Germany
imec.availabilityPublished - imec


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