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On the physics of stiction and its impact on the reliability of microstructures

dc.contributor.authorvan Spengen, Merlijn
dc.contributor.authorPuers, Bob
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-15T07:20:36Z
dc.date.available2021-10-15T07:20:36Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8299
dc.sourceIIOimport
dc.titleOn the physics of stiction and its impact on the reliability of microstructures
dc.typeJournal article
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage563
dc.source.endpage582
dc.source.journalJournal of Adhesion Science and Technology
dc.source.issue4
dc.source.volume17
imec.availabilityPublished - open access


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