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On the physics of stiction and its impact on the reliability of microstructures
Publication:
On the physics of stiction and its impact on the reliability of microstructures
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Date
2003
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6506.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
van Spengen, Merlijn
;
Puers, Bob
;
De Wolf, Ingrid
Journal
Journal of Adhesion Science and Technology
Abstract
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1896
since deposited on 2021-10-15
Acq. date: 2025-12-10
Citations
Metrics
Views
1896
since deposited on 2021-10-15
Acq. date: 2025-12-10
Citations