Publication:
On the physics of stiction and its impact on the reliability of microstructures
Date
| dc.contributor.author | van Spengen, Merlijn | |
| dc.contributor.author | Puers, Bob | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Puers, Bob | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-15T07:20:36Z | |
| dc.date.available | 2021-10-15T07:20:36Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8299 | |
| dc.source.beginpage | 563 | |
| dc.source.endpage | 582 | |
| dc.source.issue | 4 | |
| dc.source.journal | Journal of Adhesion Science and Technology | |
| dc.source.volume | 17 | |
| dc.title | On the physics of stiction and its impact on the reliability of microstructures | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |