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Dopant profiling in Ge

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorGeenen, Luc
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorSatta, Alessandra
dc.date.accessioned2021-10-15T07:28:46Z
dc.date.available2021-10-15T07:28:46Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8329
dc.sourceIIOimport
dc.titleDopant profiling in Ge
dc.typeMeeting abstract
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.source.peerreviewno
dc.source.beginpage163
dc.source.conferenceInternational Conference on Secondary Ion Mass Spectrometry - SIMS XIV
dc.source.conferencedate14/09/2003
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - imec


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