dc.contributor.author | Vereecke, Guy | |
dc.contributor.author | Holsteyns, Frank | |
dc.contributor.author | Xu, Kaidong | |
dc.contributor.author | Lux, Marcel | |
dc.contributor.author | Vos, Rita | |
dc.contributor.author | Mertens, Paul | |
dc.contributor.author | Loper, S. | |
dc.contributor.author | Grothe, P. | |
dc.date.accessioned | 2021-10-15T07:38:55Z | |
dc.date.available | 2021-10-15T07:38:55Z | |
dc.date.issued | 2003 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8366 | |
dc.source | IIOimport | |
dc.title | Evaluation of megasonic cleaning for particle removal efficiency and damaging | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Vereecke, Guy | |
dc.contributor.imecauthor | Holsteyns, Frank | |
dc.contributor.imecauthor | Lux, Marcel | |
dc.contributor.imecauthor | Vos, Rita | |
dc.contributor.imecauthor | Mertens, Paul | |
dc.contributor.orcidimec | Vereecke, Guy::0000-0001-9058-9338 | |
dc.source.peerreview | no | |
dc.source.conference | 3rd Annual FSI Surface Conditioning Symposium | |
dc.source.conferencedate | 9/07/2003 | |
dc.source.conferencelocation | Chaska USA | |
imec.availability | Published - imec | |