Show simple item record

Current FeRAM technology developments and scaling towards 3-D capacitor cells

dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-15T07:49:53Z
dc.date.available2021-10-15T07:49:53Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8407
dc.sourceIIOimport
dc.titleCurrent FeRAM technology developments and scaling towards 3-D capacitor cells
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage28
dc.source.endpage29
dc.source.conferenceExtended Abstracts of the 2003 International Conference on Solid State Device and Materials
dc.source.conferencedate16/09/2003
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record