MOCVD-SBT thin films for advanced FeRAM: deposition and film formation processes

Thumbnail
View/open
Metadata
Show full item record
Authors
Wouters, Dirk; Everaert, Jean-Luc; Schwitters, Michael; Johnson, Jo; Vander Meeren, Hans; Monchoix, H.; Mitaut, C.; Van Autryve, L.; Caputa, C.; Zambrano, R.
Conference
15th International Symposium on Integrated Ferroelectrics - ISIF
Title
MOCVD-SBT thin films for advanced FeRAM: deposition and film formation processes
Publication type
Meeting abstract
Embargo date
9999-12-31
Collections