Authors

Xu, Zhen; Kaczer, Ben; Degraeve, Robin; De Gendt, Stefan; Heyns, Marc; Groeseneken, Guido

Issue

5

Journal

Journal of the Electrochemical Society

Volume

150

Title

Electrical properties of Al2O3/ZrO2/Al2O3 gate stack in p-substrate metal oxide semiconductor devices

Publication type

Journal article

Embargo date

9999-12-31