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Correlation between solvent diffusion, porosity and pore sealing for low k dielectrics

dc.contributor.authorAbell, Thomas
dc.contributor.authorShamiryan, Denis
dc.contributor.authorPatz, Matthias
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T12:38:35Z
dc.date.available2021-10-15T12:38:35Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8456
dc.sourceIIOimport
dc.titleCorrelation between solvent diffusion, porosity and pore sealing for low k dielectrics
dc.typeProceedings paper
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage549
dc.source.endpage553
dc.source.conferenceAdvanced Metallization Conference 2003
dc.source.conferencedate21/10/2003
dc.source.conferencelocationMontreal/Tokyo
imec.availabilityPublished - open access
imec.internalnotesConference Proceedings AMC XIX


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