Plasma damage in HIMOSTM non-volatile memories (NVM)

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Authors

Ackaert, J.; Lowe, A.; De Backer, E.; Boonen, S.; Yao, T.; Van Houdt, Jan; Haspeslagh, Luc

Conference

IEEE International Conference on Integrated Circuit Design and Technology - ICICDT

Title

Plasma damage in HIMOSTM non-volatile memories (NVM)

Publication type

Proceedings paper

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Conference contributions