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Plasma damage in HIMOSTM non-volatile memories (NVM)

dc.contributor.authorAckaert, J.
dc.contributor.authorLowe, A.
dc.contributor.authorDe Backer, E.
dc.contributor.authorBoonen, S.
dc.contributor.authorYao, T.
dc.contributor.authorVan Houdt, Jan
dc.contributor.authorHaspeslagh, Luc
dc.date.accessioned2021-10-15T12:38:39Z
dc.date.available2021-10-15T12:38:39Z
dc.date.issued2004-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8461
dc.sourceIIOimport
dc.titlePlasma damage in HIMOSTM non-volatile memories (NVM)
dc.typeProceedings paper
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.source.peerreviewno
dc.source.beginpage223
dc.source.endpage226
dc.source.conferenceIEEE International Conference on Integrated Circuit Design and Technology - ICICDT
dc.source.conferencedate17/05/2004
dc.source.conferencelocationAustin, TX USA
imec.availabilityPublished - imec


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