Surface passivation of silicon by means of negative charge dielectrics
dc.contributor.author | Agostinelli, Guido | |
dc.contributor.author | Vitanov, P. | |
dc.contributor.author | Alexieva, Z. | |
dc.contributor.author | Harizanova, A. | |
dc.contributor.author | Dekkers, Harold | |
dc.contributor.author | De Wolf, Stefaan | |
dc.contributor.author | Beaucarne, Guy | |
dc.date.accessioned | 2021-10-15T12:38:49Z | |
dc.date.available | 2021-10-15T12:38:49Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8471 | |
dc.source | IIOimport | |
dc.title | Surface passivation of silicon by means of negative charge dielectrics | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Dekkers, Harold | |
dc.contributor.orcidimec | Dekkers, Harold::0000-0003-4778-5709 | |
dc.source.peerreview | no | |
dc.source.beginpage | 132 | |
dc.source.endpage | 134 | |
dc.source.conference | Proceedings of the 19th European Photovoltaic Solar Energy Conference | |
dc.source.conferencedate | 7/06/2004 | |
dc.source.conferencelocation | Paris France | |
imec.availability | Published - imec |
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