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Composite nanoparticles for defectivity reduction during CMP

dc.contributor.authorArmini, Silvia
dc.contributor.authorTerzieva, Valentina
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T12:39:13Z
dc.date.available2021-10-15T12:39:13Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8489
dc.sourceIIOimport
dc.titleComposite nanoparticles for defectivity reduction during CMP
dc.typeProceedings paper
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorTerzieva, Valentina
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewno
dc.source.conferenceAmerican Institute of Chemical Engineers (AIChe) Annual Meeting
dc.source.conferencedate7/11/2004
dc.source.conferencelocationAustin USA
imec.availabilityPublished - imec
imec.internalnotesCD-ROM proceedings


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