dc.contributor.author | Armini, Silvia | |
dc.contributor.author | Terzieva, Valentina | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-10-15T12:39:13Z | |
dc.date.available | 2021-10-15T12:39:13Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8489 | |
dc.source | IIOimport | |
dc.title | Composite nanoparticles for defectivity reduction during CMP | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Armini, Silvia | |
dc.contributor.imecauthor | Terzieva, Valentina | |
dc.contributor.imecauthor | Maex, Karen | |
dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
dc.source.peerreview | no | |
dc.source.conference | American Institute of Chemical Engineers (AIChe) Annual Meeting | |
dc.source.conferencedate | 7/11/2004 | |
dc.source.conferencelocation | Austin USA | |
imec.availability | Published - imec | |
imec.internalnotes | CD-ROM proceedings | |