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Automatic generation of shallow electrically active dopant profiles from spreading resistance measurements
Publication:
Automatic generation of shallow electrically active dopant profiles from spreading resistance measurements
Date
1994
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Clarysse, Trudo
;
Vandervorst, Wilfried
Journal
J. Vac. Sci. Technol. B
Abstract
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33282
since deposited on 2021-09-29
438
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
33282
since deposited on 2021-09-29
438
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations