World of MEMS
dc.contributor.author | Baert, Kris | |
dc.date.accessioned | 2021-10-15T12:39:53Z | |
dc.date.available | 2021-10-15T12:39:53Z | |
dc.date.issued | 2004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8511 | |
dc.source | IIOimport | |
dc.title | World of MEMS | |
dc.type | Oral presentation | |
dc.source.peerreview | no | |
dc.source.conference | Electronica 2004 | |
dc.source.conferencedate | 11/11/2004 | |
dc.source.conferencelocation | München Germany | |
imec.availability | Published - imec | |
imec.internalnotes | Panel discussion |
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