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Integration of photonic functions in and with silicon

dc.contributor.authorBaets, Roel
dc.contributor.authorBogaerts, Wim
dc.contributor.authorDumon, Pieter
dc.contributor.authorRoelkens, Gunther
dc.contributor.authorChristiaens, Ilse
dc.contributor.authorDe Mesel, Kurt
dc.contributor.authorTaillaert, Dirk
dc.contributor.authorLuyssaert, Bert
dc.contributor.authorVan Campenhout, Joris
dc.contributor.authorBienstman, Peter
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorWiaux, Vincent
dc.contributor.authorWouters, Johan M. D.
dc.contributor.authorBeckx, Stephan
dc.date.accessioned2021-10-15T12:40:08Z
dc.date.available2021-10-15T12:40:08Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8517
dc.sourceIIOimport
dc.titleIntegration of photonic functions in and with silicon
dc.typeProceedings paper
dc.contributor.imecauthorBaets, Roel
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorVan Campenhout, Joris
dc.contributor.imecauthorBienstman, Peter
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorWiaux, Vincent
dc.contributor.imecauthorWouters, Johan M. D.
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecVan Campenhout, Joris::0000-0003-0778-2669
dc.contributor.orcidimecBienstman, Peter::0000-0001-6259-464X
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.source.peerreviewno
dc.source.beginpage57
dc.source.endpage62
dc.source.conferenceProceedings of the 34th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate21/09/2004
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


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