Ellipsometric nanoporosimetry
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-15T12:40:20Z | |
| dc.date.available | 2021-10-15T12:40:20Z | |
| dc.date.issued | 2004-12 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8522 | |
| dc.source | IIOimport | |
| dc.title | Ellipsometric nanoporosimetry | |
| dc.type | Proceedings paper | |
| dc.source.peerreview | yes | |
| dc.source.beginpage | ? | |
| dc.source.conference | Proceedings 1st International Conference on Standard Materials and Metrology for Nanotechnolgy | |
| dc.source.conferencedate | 15/03/2004 | |
| dc.source.conferencelocation | Tokyo Japan | |
| imec.availability | Published - imec |
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