In-situ ellipsometry for BEOL research and development
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-15T12:40:22Z | |
| dc.date.available | 2021-10-15T12:40:22Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8523 | |
| dc.source | IIOimport | |
| dc.title | In-situ ellipsometry for BEOL research and development | |
| dc.type | Oral presentation | |
| dc.source.peerreview | no | |
| dc.source.conference | Germany Seminar "Messen von Dünnen Schichten" | |
| dc.source.conferencedate | 8/11/2004 | |
| dc.source.conferencelocation | Berlin Germany | |
| imec.availability | Published - imec |
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