Show simple item record

Porous low dielectric constant materials for microelectronics

dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-15T12:40:25Z
dc.date.available2021-10-15T12:40:25Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8524
dc.sourceIIOimport
dc.titlePorous low dielectric constant materials for microelectronics
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceThe Royal Society Scientific Discussion Meeting "Engineered Foams and Porous materials"
dc.source.conferencedate1/11/2004
dc.source.conferencelocationLondon UK
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record