Porous low dielectric constant materials for microelectronics
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-15T12:40:27Z | |
| dc.date.available | 2021-10-15T12:40:27Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8525 | |
| dc.source | IIOimport | |
| dc.title | Porous low dielectric constant materials for microelectronics | |
| dc.type | Oral presentation | |
| dc.source.peerreview | no | |
| dc.source.conference | EDCoT (Emerging Dielectrics and Conductors Technology) | |
| dc.source.conferencedate | 20/12/2004 | |
| dc.source.conferencelocation | Nazareth Israel | |
| imec.availability | Published - imec |
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