dc.contributor.author | Schmidt, Harald | |
dc.contributor.author | Teerlinck, Ivo | |
dc.contributor.author | Meuris, Marc | |
dc.contributor.author | Mertens, Paul | |
dc.contributor.author | Heyns, Marc | |
dc.date.accessioned | 2021-09-29T13:16:11Z | |
dc.date.available | 2021-09-29T13:16:11Z | |
dc.date.issued | 1995 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/854 | |
dc.source | IIOimport | |
dc.title | In situ and real time characterization of wet chemical silicon surface processes by electrochemical open circuit potential measurements | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Meuris, Marc | |
dc.contributor.imecauthor | Mertens, Paul | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | Meuris, Marc::0000-0002-9580-6810 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 316 | |
dc.source.endpage | 327 | |
dc.source.conference | ALTECH 95: Analytical Techniques for Semiconductor Materials and Process Characterization II. Proceedings of the Satellite Sympo | |
dc.source.conferencedate | 28/09/1995 | |
dc.source.conferencelocation | Den Haag The Netherlands | |
imec.availability | Published - open access | |
imec.internalnotes | Electrochemical Society Proceedings; Vol. 95-30 | |