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Application of FIB to support semiconductor process development

dc.contributor.authorBender, Hugo
dc.date.accessioned2021-10-15T12:42:06Z
dc.date.available2021-10-15T12:42:06Z
dc.date.issued2004-08
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8558
dc.sourceIIOimport
dc.titleApplication of FIB to support semiconductor process development
dc.typeProceedings paper
dc.contributor.imecauthorBender, Hugo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage757
dc.source.endpage758
dc.source.conferenceProceedings of the 13th European Microscopy Congress. Volume 2: Materials Sciences
dc.source.conferencedate22/08/2004
dc.source.conferencelocationAntwerpen Belgium
imec.availabilityPublished - open access


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