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SOI nanophotonic waveguide structures fabricated with Deep UV lithography

dc.contributor.authorBogaerts, Wim
dc.contributor.authorDumon, Pieter
dc.contributor.authorTaillaert, Dirk
dc.contributor.authorWiaux, Vincent
dc.contributor.authorBeckx, Stephan
dc.contributor.authorLuyssaert, Bert
dc.contributor.authorVan Campenhout, Jan
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-15T12:45:02Z
dc.date.available2021-10-15T12:45:02Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8602
dc.sourceIIOimport
dc.titleSOI nanophotonic waveguide structures fabricated with Deep UV lithography
dc.typeJournal article
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorWiaux, Vincent
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.source.peerreviewno
dc.source.beginpage81
dc.source.endpage86
dc.source.journalPhotonics and Nanostructures - Fundamentals and Applications
dc.source.issue2
dc.source.volume2
imec.availabilityPublished - imec


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