Publication:

SOI nanophotonic waveguide structures fabricated with Deep UV lithography

Date

2004

Journal article

Simple item page Full metadata Statistics

Author(s)

;

;

Taillaert, Dirk

;

;

;

Luyssaert, Bert

;

Van Campenhout, Jan

;

Van Thourhout, Dries

;

Journal

Photonics and Nanostructures - Fundamentals and Applications

Statistics

1866 since deposited on 2021-10-15

1last month

Acq. date: 2026-08-08