Publication:

SOI nanophotonic waveguide structures fabricated with Deep UV lithography

Date

2004

Journal article

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Author(s)

;

;

Taillaert, Dirk

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Luyssaert, Bert

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Van Campenhout, Jan

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Van Thourhout, Dries

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Journal

Photonics and Nanostructures - Fundamentals and Applications

Metrics

1865 since deposited on 2021-10-15

Acq. date: 2025-12-15