Publication:

SOI nanophotonic waveguide structures fabricated with Deep UV lithography

Date

2004
Journal article
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dc.contributor.authorBogaerts, Wim
dc.contributor.authorDumon, Pieter
dc.contributor.authorTaillaert, Dirk
dc.contributor.authorWiaux, Vincent
dc.contributor.authorBeckx, Stephan
dc.contributor.authorLuyssaert, Bert
dc.contributor.authorVan Campenhout, Jan
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBaets, Roel
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorWiaux, Vincent
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.accessioned2021-10-15T12:45:02Z
dc.date.available2021-10-15T12:45:02Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8602
dc.source.beginpage81
dc.source.endpage86
dc.source.issue2
dc.source.journalPhotonics and Nanostructures - Fundamentals and Applications
dc.source.volume2
dc.title

SOI nanophotonic waveguide structures fabricated with Deep UV lithography

dc.typeJournal article
dspace.entity.typePublication
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