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Cross-section nano-indentation for rapid adhesion evaluation

dc.contributor.authorBrongersma, Sywert
dc.contributor.authorDegryse, Dominiek
dc.contributor.authorSouiller, Jérôme
dc.contributor.authorVandevelde, Bart
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T12:48:02Z
dc.date.available2021-10-15T12:48:02Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8640
dc.sourceIIOimport
dc.titleCross-section nano-indentation for rapid adhesion evaluation
dc.typeProceedings paper
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorVandevelde, Bart
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.contributor.orcidimecVandevelde, Bart::0000-0002-6753-6438
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage291
dc.source.endpage296
dc.source.conferenceMaterials Technology and Reliability for Advanced Interconnects and Low-k Dielectrics
dc.source.conferencedate13/04/2004
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access
imec.internalnotesMRS Symposium Proceedings; Vol. 812


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